 ACOUSTO-OPTIC ULTRAVIOLET LASER EXPLORING MICROSCOPE ™
Russian Technological Association™ presents the world first Programmable Acousto-Optic UV Laser Exploring Microscope (AO-UV LEM)* designed for PC controlled ultra fast X-Y precise positioning of UV laser beam focused on the surface of an micro object. The system allows programmable change and control the light power of laser spot simultaneously with changing of its position on the surface. The models presented are specified to be used with the 3rd harmonic of YAG:Nd lasers (model LEM- 355- 01 ™®) or with the 4th harmonic of YAG:Nd lasers (model LEM- 266- 01 ™®).
The AO-UV LEM is constructed as the set of separate modules, which could be combined in the different configuration, presented below.
 Basic (B) - DA-AO-UV Scanner based on UV 2-D AOD* variable output UV Scan Lenses and programmable PC controlled RF Driver;
Advanced (A) - Basic (B) system with additional UV objective , CCD based module for self testing (position and amplitude linearization), as well as for visualization of an laser spot on a surface of micro-object. A-System includes also the separate channel consists of a PM as detector with optic-electronic environment for UV imaging and TV watching of scanning surface;
Expanded (E) - Advanced (A) system with additional channel for detection of UV laser induced fluorescence (LIF);
All modification of AO-UV LEM can operate with different models of UV lasers.
Models operating with other wavelength between UV and IR parts of spectra are available by request.
AO-UV Laser Exploring Microscope (LEM- 355-01)*
FEATURES AND ADVANTAGES | APPLICATIONS | High Efficiency UV Range Operation | Cell Engineering | | Large Dual Axis Scanning Angle | DNA & Bacterial Analyses | | High Resolution | Laser Induced Fluorescent | | PC Controlling of Single Laser "Shots" | Spectroscopy (LIF) | | Pixel and Vector Graphics as well as "Custom Made" Programs | Laser Marking and Drilling | | UV Imaging of Micro-Object | Semiconductor Wafer and Mask | | Fluorescence Mapping | Inspection | | Laser Destroying of Micro Aims | Laser Photolithography |
SPECIFICATION AO-UV Laser Exploring Microscope (model LEM-355-01)*
AO UV Deflector | RTA-TE-355** | Operational Wavelength | 355 nm | Polarization | Linear (vertical or horizontal) | Laser Divergence | Diffraction limited | Input Beam diameter | 2.0 mm- 6.0 mm (TEM00) | Scanning Angle/Axis | 2.2 degrees | Scanning Area | 2.5mm x 2.5mm (Basic) 0.5 mm x 0.5 mm (Advanced) 0.5 mm x 0.5 mm (Expended) | Spot Size on the object | ca.5.0 µm (Basic) ca.1.5 µm (Advanced) ca.1.5 µm (Expended) | Resolution | ca. 540 x 540 @ 5.0 mm active aperture | Access time (switching speed) | <6µs @ 5.0 mm active aperture | RF Range | 140 MHz - 210 MHz | number of discrets (in scanning angle) | 16 383 (per axe) | number of discrets (RF Power) | 16 383 | Max. frequency of laser pulses for laser synchro-triggering | <50 kHz |
SPECIFICATION AO-UV Laser Exploring Microscope (model LEM-266-01)*
AO UV Deflector | RTA-KDP-266* | Operational Wavelength | 266 nm | Polarization | Linear (vertical or horizontal) | Laser Divergence | Diffraction limited | Input Beam diameter | 2.0 - 6.0 mm (TEM00) | Scanning Angle/Axis | 0.4 degrees | Scanning Area | 0.5 x 0.5mm (Basic) 2.5 x 2.5 mm (Basic) 0.1 x 0.1 mm (Advanced) | Spot Size on the object | ca.3.7 µm (Basic) ca.1.1 µm (Advanced, Expended) | Resolution | ca. 180 x 180 (at 6.0 mm active aperture) | Access time (switching speed) | <3.6µs (at 6.0 mm active aperture) | RF Range | 55 MHz - 105 MHz | Number of discrets (scanning angle) | 16 383 (per axe) | Number of discrets (RF Power) | 16 383 | Max. frequency of laser pulses for laser synchro-triggering | < 50kHz |
* Patent Russia # 219 37 93 ** Patent Russia # 219 97 29 |
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